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(585) 482 - 5551

132 Humboldt St.

Rochester, NY 14610​

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© 2018 T&C Power Conversion, Inc.

13.56 MHz RF Power Systems

Each system contains a 

and

These are ideal solutions for plasma apps like etching, cleaning, deposition and more

Choose from our models below to build your ideal system

Power source:

Matching network:

RF Matching Network
  • 100 W to 2400 W

  • 13.56 MHz 

  • Half rack mount or stand alone versions

  • Air cooled (Air & Water 1200 W +)

  • Analog & Digitial Interface

  • Complete generator & tuner control via front panel

  • GUI Software

  • Includes all essential RF power/communication cables and mounting brackets

  • 100 W to 2400 W

  • 13.56 MHz 

  • Half rack mount or stand alone versions (R Series)

  • Air & Vacuum capacitors

  • Analog & Digitial Interface

  • Front panel display for network positions

  • Controller available for manually tuning network

 

Brochures: Full-rack mount

Brochures: Stand-alone units

CONTACT US

Request a quote 

Tell us what model you're interested in 

Or request more info

Tell us more about your application and we'll help you out!

AIT-600 R Series

No Interface Option.