13.56 MHz RF Power Systems
Each system contains a
and
These are ideal solutions for plasma apps like etching, cleaning, deposition and more
Choose from our models below to build your ideal system
Power source:
Includes front panel interface and complete matching network control & compatibility.
Basic model. No front panel controls.
Includes front panel interface and complete matching network control & compatibility.
Matching network:
RF Matching Network
Version 1: with front panel display and controls
Automatic Impedance Tuner with Front Panel Display.
No Interface Option.
Version 1: with front panel display and controls
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100 W to 2400 W
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13.56 MHz
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Half rack mount or stand alone versions
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Air cooled (Air & Water 1200 W +)
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Analog & Digitial Interface
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Complete generator & tuner control via front panel
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Includes all essential RF power/communication cables and mounting brackets
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100 W to 2400 W
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13.56 MHz
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Half rack mount or stand alone versions (R Series)
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Air & Vacuum capacitors
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Analog & Digitial Interface
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Front panel display for network positions
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Controller available for manually tuning network
Brochures: Full-rack mount
Brochures: Stand-alone units
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