13.56 MHz RF Power Systems

Each system contains a 

and

These are ideal solutions for plasma apps like etching, cleaning, deposition and more

Choose from our models below to build your ideal system

Power source:

AG 0x13 Series
AG 0x13 Series

Includes front panel interface and complete matching network control & compatibility.

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0x13 Series
0x13 Series

Basic model. No front panel controls.

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AG 0x13 Series
AG 0x13 Series

Includes front panel interface and complete matching network control & compatibility.

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1/2

Matching network:

RF Matching Network
AIT-600 R Series
AIT-600 R Series

Version 1: with front panel display and controls

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AIT-600
AIT-600

Automatic Impedance Tuner with Front Panel Display.

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AIT-600 R Series
AIT-600 R Series

No Interface Option.

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AIT-600 R Series
AIT-600 R Series

Version 1: with front panel display and controls

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  • 100 W to 2400 W

  • 13.56 MHz 

  • Half rack mount or stand alone versions

  • Air cooled (Air & Water 1200 W +)

  • Analog & Digitial Interface

  • Complete generator & tuner control via front panel

  • GUI Software

  • Includes all essential RF power/communication cables and mounting brackets

  • 100 W to 2400 W

  • 13.56 MHz 

  • Half rack mount or stand alone versions (R Series)

  • Air & Vacuum capacitors

  • Analog & Digitial Interface

  • Front panel display for network positions

  • Controller available for manually tuning network

 

Brochures: Full-rack mount

Brochures: Stand-alone units

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