Each system contains a 

and

These are ideal solutions for plasma apps like etching, cleaning, deposition and more

Choose from our models below to build your ideal system

Power source:

Matching network:

RF Matching Network

• 100 W to 2400 W

• 13.56 MHz 

• Half rack mount or stand alone versions

• Air cooled (Air & Water 1200 W +)

• Analog & Digitial Interface

• Complete generator & tuner control via front panel

• GUI Software

• Includes all essential RF power/communication cables and mounting brackets

• 100 W to 2400 W

• 13.56 MHz 

• Half rack mount or stand alone versions (R Series)

• Air & Vacuum capacitors

• Analog & Digitial Interface

• Front panel display for network positions

• Controller available for manually tuning network